| 技术特性 | COS安装面高度差精度 ±0.01mm |
| 平面度 | ≤0.05mm |
| 粗糙度 | 0.8um |
| 气密性 | ≤1x10-3Pa.cm3/s(He) |
| 绝缘电阻 | ≥1x1010Ω(500V DC)（玻璃） ≥1x1010Ω(500V DC)（陶瓷） |
| 防盐雾能力 | 24h |
| 镀层质量考核 | N2, 450±10℃, 15min |
| 温度循环 | -55℃~125℃, 20cycles |
| 热冲击 | -55℃~125℃, 20cycles |
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